安赛斯12寸可编程匀胶机

ANALYSIS Programmable Spin Coater

安赛斯^TM可编程匀胶机(旋涂仪)

Model: HC300SE

安赛斯12寸可编程匀胶机

BENEFITS

优势

• Compact design for minimized footprint

设计紧凑，占地面积最小化

• Full-color, 7-inch touch screen display

全彩色7英寸触摸屏显示屏

• High-density polyethylene (HDPE) spin bowl for maximum chemical compatibility

高密度聚乙烯(HDPE)旋转碗化学相容性

• Durable benchtop design that is also available in a flange/ deck mountable configuration

耐用的台式设计，也可采用法兰/甲板安装配置

• Advanced PLC fully automatic program control

高级PLC自动程序控制

• Motor glue protection; Easy to clear pipeline design

电机进胶?；?，管路易疏通设计

BOWL DESIGN

碗形设计

• High-density polyethylene (HDPE) spin bowl

高密度聚乙烯（HDPE）旋转碗

• Optional aluminum foil disposable liners available

可选铝箔一次性内衬

• Polycarbonate transparent lid design beautiful and corrosion-resistant

透明的聚碳酸酯盖子，美观耐腐蚀

• Can be placed in Fume hood for use in atmospheric environments

可放在通风橱内，用于气氛环境使用

• Spin bowl size 413mm, convenient for operation

旋涂碗尺寸413mm，方便操作

PROGRAMMABILITY

可编程性

• Touch screen interface and display

触摸屏界面和显示器

• Full-color alphanumeric-capable graphical user interface (GUI)

具有全彩色字母数字功能的图形用户界面（GUI）

• 100 of user-defined recipe programs，with100 steps for each program

100组用户定义配方程序，每个程序100步。

• 0.1-second resolution for step times (3000 seconds maximum step time)

步长为0.1秒的分辨率（3000秒最大步进）

• Spin speed: 6,000 rpm

转速：6000 rpm

• Spin speed acceleration:

旋转速度加速度：

0 to 30,000 rpm/s unloaded

0至30000转/秒无负载

• Optional Simultaneous, automated, mulit-dispense capability

可选同时、自动化、多路点胶分配功能

PRECISION

精密度

• Spin speed repeatability: 0.1 rpm

转速可重复性：0.1 rpm

• Spin speed resolution: 0.1 rpm

转速分辨率：0.1 rpm

• Substrate sizes: 0.5cm to 300 mm round; Or equally sized square samples

基板尺寸：0.5 cm至300 mm圆形或同等尺寸（对角线）方形样品

RELIABILITY

可靠性

• Indirect drive system protects the spin motor from contact with process chemicals and solvents

异位电机设置?；ば缁皇芙哟ナ褂霉ひ栈泛腿芗?/span>

• Vacuum and lid interlock

真空和盖子安全检测互锁

• Industry-leading reliability and uptime

可靠性和正常运行时间

• 1-year full warranty on parts and labor

零件和劳动力的1年全面保修

• Free remote technical support (phone, fax) for the life of the product

远程技术支持（电话、电子邮件、传真）

• Application process assistance for life of the product

产品使用寿命的应用程序帮助

UTILITIES

产品外设

• Voltage ranges: 100-125, 208-240 VAC, 50/60 Hz

电压范围：100-125、208-240 VAC、50/60 Hz

• Power requirements :1200 watts

功率要求：1200瓦

• Exhaust port: 6mm OD

真空接口：6mm

• Vacuum: -92kPa，90L/min

真空：-92kPa，90L/min

DIMENSIONS

尺寸

• 24.1” (51.5cm) W × 18.2” (51.5cm) D × 12” (35cm) H

• Machine weight:55.1lb (25kg)

• Shipping weight: 44.1lb (66kg)）

安赛斯12寸可编程匀胶机

ATTACHMENT

附件

• One HCV500 oil-free vacuum pump with a pumping speed of 90L/min;

HCV500无油真空泵1台，抽气速度90L/min；

• Standard with one 8-inch Spin Chuck, suitable for 8-12 inch wafer spin coating, and other sizes of Spin Chuck can be customized;

标配8英寸载物盘1只，适合8-12英寸晶元旋涂，其他尺寸规格载物盘可定制；